Wideband 60 GHz bandpass filter based on flexible PerMX polymer substrate

S. Seok, Janggil Kim, N. Rolland
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Abstract

This paper presents a wideband 60 GHz bandpass filter fabricated on flexible 50 µm-thick PerMX polymer substrate. The implemented filter is based on conventional parallel-coupled half-wavelength resonators. Thanks to the support substrate that will be finally released, the process precision can be maintained at microfabrication level. A wideband filter has been achieved through optimization of the narrow gaps between the adjacent resonators. The implemented filter shows insertion loss of 4.2 dB at the center frequency of 63.5 GHz while its return loss is better than 14 dB including two microstrip-to-CPW transitions. In addition, 3-dB bandwidth of 19 % at the center frequency of 63.5 GHz is demonstrated.
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基于柔性PerMX聚合物衬底的宽带60ghz带通滤波器
本文提出了一种基于柔性50 μ m厚PerMX聚合物衬底的60 GHz宽带带通滤波器。所实现的滤波器是基于传统的平行耦合半波长谐振器。由于支撑基板将最终释放,工艺精度可以保持在微加工水平。通过优化相邻谐振器之间的窄间隙,实现了宽带滤波器。所实现的滤波器在63.5 GHz中心频率处的插入损耗为4.2 dB,包括两次微带到cpw的转换,其回波损耗优于14 dB。此外,在63.5 GHz的中心频率下,3db带宽为19%。
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