Compact low loss silicon-on-insulator waveguide for broadband mid-infrared photonics

Abstract

Near-infrared nanophotonics has been massively studied due to its promising ability in addressing the interconnect bottleneck problem [1] and achieving resonator-based sensors with high quality factor [2] [3]. Among the various material platforms that have been applied in near infrared nanophotonics, silicon-on-insulator (SOI) platform offers advantages such as high optical mode confinement, low loss, CMOS compatibility, and mature fabrication [4].