{"title":"Analysis of Aluminum Nitride Resonators and Filters Over Temperature and Under High Power","authors":"Arash Fouladi Azarnaminy, R. Mansour","doi":"10.1109/TRANSDUCERS.2019.8808282","DOIUrl":null,"url":null,"abstract":"This paper presents an experimental investigation of the performance of Aluminum Nitride (AlN) on Silicon resonators operating over a wide temperature range. The resonators are measured over the temperature range of -196°C to +120°C. Linear and nonlinear characterization of the proposed resonator is presented over an input power range from 8dBm to 20dBm. The paper also presents measured results of a 3-pole band-pass filter designed using such type of resonators.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"20 1","pages":"897-900"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2019.8808282","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
This paper presents an experimental investigation of the performance of Aluminum Nitride (AlN) on Silicon resonators operating over a wide temperature range. The resonators are measured over the temperature range of -196°C to +120°C. Linear and nonlinear characterization of the proposed resonator is presented over an input power range from 8dBm to 20dBm. The paper also presents measured results of a 3-pole band-pass filter designed using such type of resonators.
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