Batch Fabrication of Multilayer Polymer Cantilevers with Integrated Hard Tips for High-Speed Atomic Force Microscopy

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-08-22 DOI:10.1109/TRANSDUCERS.2019.8808606

N. Hosseini, O. Peric, Matthias Neuenschwander, Santiago H. Andany, J. Adams, G. Fantner

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Abstract

Increasing the speed of AFM imaging has significant benefits for academic research as well as industrial applications. In many imaging modes, the dynamic response of the cantilever probe dictates the achievable speed. Polymer cantilevers have gained great attention due to their high tracking ability and ease of fabrication. However, polymer cantilevers also have drawbacks. Polymers are not well suitable materials for the tip of the probe due to their high wear rate. This has limited the broader use of polymer cantilevers for AFM imaging. In this work, we combine the advantages of polymer cantilevers with the advantages of cantilevers made of conventional MEMS materials. We demonstrate the batch integration of a hard tip into a polymer-core multilayer cantilever probe, thereby merging speed, high-resolution and durability in a single cantilever.

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高速原子力显微镜用集成硬尖端多层聚合物悬臂梁的批量制备

提高原子力显微镜成像的速度对学术研究和工业应用都有显著的好处。在许多成像模式中，悬臂探头的动态响应决定了可实现的速度。聚合物悬臂梁因其高跟踪能力和易于制造而受到广泛关注。然而，聚合物悬臂也有缺点。聚合物由于其高磨损率而不是很适合用于探针尖端的材料。这限制了聚合物悬臂梁在AFM成像中的广泛应用。在这项工作中，我们将聚合物悬臂梁的优点与传统MEMS材料制成的悬臂梁的优点结合起来。我们演示了将硬尖端批量集成到聚合物核心多层悬臂探针中，从而将速度，高分辨率和耐用性融合在单个悬臂中。

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2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

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