T. Mogami, T. Horikawa, K. Kinoshita, H. Sasaki, K. Morito, K. Kurata
{"title":"A 300mm Si photonics platform for optical interconnection","authors":"T. Mogami, T. Horikawa, K. Kinoshita, H. Sasaki, K. Morito, K. Kurata","doi":"10.1109/IITC-MAM.2015.7325665","DOIUrl":null,"url":null,"abstract":"The Si photonics platform for 300mm SOI wafers has been built up for optical multi-applications. Main optical devices have been demonstrated. State-of-the-art propagation loss values are obtained for optical waveguides of multi-thickness SOI structures in this platform. The propagation loss is less than 0.5 dB/cm at 1.55pm wavelength for 220nm-thick waveguides. MMI coupler, AWG and WDM filter showed enough high performance for their applications. The 50×50mm2 large Si interposers using photonics electronics convergence technology have been demonstrated. These results indicate that our Si photonics platform is very useful for optical multi-applications.","PeriodicalId":6514,"journal":{"name":"2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)","volume":"150 1","pages":"273-276"},"PeriodicalIF":0.0000,"publicationDate":"2015-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IITC-MAM.2015.7325665","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
The Si photonics platform for 300mm SOI wafers has been built up for optical multi-applications. Main optical devices have been demonstrated. State-of-the-art propagation loss values are obtained for optical waveguides of multi-thickness SOI structures in this platform. The propagation loss is less than 0.5 dB/cm at 1.55pm wavelength for 220nm-thick waveguides. MMI coupler, AWG and WDM filter showed enough high performance for their applications. The 50×50mm2 large Si interposers using photonics electronics convergence technology have been demonstrated. These results indicate that our Si photonics platform is very useful for optical multi-applications.
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