Modeling of BVA resonator for collective fabrication

Abstract

In this paper, we report on the use of Finite Elements Software to model and simulate new resonator designs, working at about 9 MHz. We aim to review the concept of BVA resonator by reducing the size. The miniaturization of the whole resonator will allow us to use collective processes and therefore reduce the cost of manufacturing. To achieve this result, we investigated to replace the radius of curvature, necessary for a good trapping of the vibrating energy at this frequency, by several mesas.