J. Kanicki, E. Hasan, J. Griffith, T. Takamori, J. Tsang
{"title":"Properties of High Conductivity Phosphorous Doped Hydrogenated Microcrystalline Silicon and Application in Thin Film Transistor Technology","authors":"J. Kanicki, E. Hasan, J. Griffith, T. Takamori, J. Tsang","doi":"10.1557/PROC-149-239","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":18884,"journal":{"name":"MRS Proceedings","volume":"70 1","pages":"239"},"PeriodicalIF":0.0000,"publicationDate":"1989-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"22","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"MRS Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1557/PROC-149-239","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}