Real-time detection by properties of tin dioxide for formaldehyde gas sensor

M. Zaki, U. Hashim, M. K. Md Arshad, M. Fathil, A. R. Ruslinda, R. M. Ayub, S. Gopinath, C. Voon, K. L. Foo, R. Adzhri, A. H. Azman
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引用次数: 5

Abstract

This paper presents real time detection of formaldehyde gas by using the properties of tin dioxide (SnO2) thin film on a formaldehyde gas sensor. SnO2 thin film is coated on aluminum IDE electrodes which is fabricated on a glass substrate by using sol-gel technique and annealed to get the crystallization of SnO2. The surface morphologies of the SnO2 thin film is examined and studied through atomic force microscopy (AFM). For the real-time detection, formaldehyde gas was inject inside the gas chamber. The hot plate with the temperature of 200°C inside the gas chamber is used to evaporate the formaldehyde gas, subsequently exposing it to the surface of SnO2 thin film. Electrical conductivity of the SnO2 thin film is increased and allowed current to flow through it. The potential difference at the gas sensor is measured using voltmeter. During real time detection, various amount of formaldehyde liquid which are 0.1 μl, 0.3 μl, and 0.5 μl are injected into the gas chamber, thus produced potential differences of 0.8 V, 2.2 V and 3.5 V, respectively.
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二氧化锡性能对甲醛气体传感器的实时检测
本文介绍了利用二氧化锡(SnO2)薄膜在甲醛气体传感器上的特性对甲醛气体进行实时检测。采用溶胶-凝胶法制备在玻璃基板上的铝IDE电极,在电极表面涂覆SnO2薄膜,并退火得到SnO2结晶。利用原子力显微镜(AFM)对SnO2薄膜的表面形貌进行了观察和研究。为了实时检测,在毒气室内注入甲醛气体。在气室内使用温度为200℃的热板将甲醛气体蒸发,然后将其暴露在SnO2薄膜表面。SnO2薄膜的电导率提高,并允许电流通过。用电压表测量气体传感器处的电位差。实时检测时,将0.1 μl、0.3 μl和0.5 μl的甲醛液体注入气室内,分别产生0.8 V、2.2 V和3.5 V的电位差。
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