Studies on the Effect of Pole Piece Shape for Saturated Single Pole Magnetic Lens

S. S. Elshahat, A. Amir, G. S. Hassan
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引用次数: 7

Abstract

Magnetic electron objective lens is of a great importance for electron microscope intended for high resolution. The present work investigates the objective properties of a single pole piece magnetic lens with different pole piece shapes. The results indicate that the lens with a spherical pole – face has the best resolution. Keywords: Finite element method; objective magnetic lenses; aberration PACS: 41.85
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饱和单极磁透镜极片形状影响的研究
磁性电子物镜是高分辨率电子显微镜的重要组成部分。本文研究了具有不同极片形状的单极片磁透镜的物镜性质。结果表明,球面极面透镜具有最佳的分辨率。关键词:有限元法;物镜磁透镜;像差PACS: 41.85
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