{"title":"Recent Studies on Area Selective Atomic Layer Deposition of Elemental Metals","authors":"Min Gyoo Cho, Jae Hee Go, Byung Joon Choi","doi":"10.4150/kpmi.2023.30.2.156","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":16122,"journal":{"name":"Journal of Korean Powder Metallurgy Institute","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2023-04-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Korean Powder Metallurgy Institute","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.4150/kpmi.2023.30.2.156","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}