T. Sakka, Satoshi Akiba, Akira Kuroyanagi, Kokichi Hotta, Y. Ogata, M. Mabuchi
{"title":"Absorption of pulsed CO2 laser in silicon and resulting laser ablation and surface damage formation","authors":"T. Sakka, Satoshi Akiba, Akira Kuroyanagi, Kokichi Hotta, Y. Ogata, M. Mabuchi","doi":"10.1016/S1288-3255(99)80003-3","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":101031,"journal":{"name":"Plasmas & Ions","volume":"2 1","pages":"23-28"},"PeriodicalIF":0.0000,"publicationDate":"1998-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"8","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Plasmas & Ions","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/S1288-3255(99)80003-3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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