P. Hillger, R. Jain, J. Grzyb, L. Mavarani, B. Heinemann, G. MacGrogan, P. Mounaix, T. Zimmer, U. Pfeiffer
{"title":"A 128-pixel 0.56THz sensing array for real-time near-field imaging in 0.13μm SiGe BiCMOS","authors":"P. Hillger, R. Jain, J. Grzyb, L. Mavarani, B. Heinemann, G. MacGrogan, P. Mounaix, T. Zimmer, U. Pfeiffer","doi":"10.1109/ISSCC.2018.8310362","DOIUrl":null,"url":null,"abstract":"Real-time terahertz video cameras are regarded as key enabler systems for numerous applications. Unfortunately, their spatial resolution is fundamentally restricted by the diffraction limit. Near-field-scanning optical microscopy (NSOM) is used in the THz domain to break through this limit [1]. Recently reported THz near-field sensors based on silicon technology promise significant improvements compared to NSOM with respect to sensor sensitivity, system cost, and scanning time [2,3]. However, only single-pixel implementations have been presented with unmodulated CW sources so far, which limits the sensors dynamic range (DR) due to detector 1/f noise. This paper scales-up the research of near-field sensing into larger surfaces made of a plurality of super-resolution pixels with video-rate imaging capabilities. The 128-pixel 0.56THz imaging array includes all functions such as illumination, sensing, detection, and digital readout on a single silicon chip.","PeriodicalId":6617,"journal":{"name":"2018 IEEE International Solid - State Circuits Conference - (ISSCC)","volume":"31 1","pages":"418-420"},"PeriodicalIF":0.0000,"publicationDate":"2018-02-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"14","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 IEEE International Solid - State Circuits Conference - (ISSCC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSCC.2018.8310362","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 14
Abstract
Real-time terahertz video cameras are regarded as key enabler systems for numerous applications. Unfortunately, their spatial resolution is fundamentally restricted by the diffraction limit. Near-field-scanning optical microscopy (NSOM) is used in the THz domain to break through this limit [1]. Recently reported THz near-field sensors based on silicon technology promise significant improvements compared to NSOM with respect to sensor sensitivity, system cost, and scanning time [2,3]. However, only single-pixel implementations have been presented with unmodulated CW sources so far, which limits the sensors dynamic range (DR) due to detector 1/f noise. This paper scales-up the research of near-field sensing into larger surfaces made of a plurality of super-resolution pixels with video-rate imaging capabilities. The 128-pixel 0.56THz imaging array includes all functions such as illumination, sensing, detection, and digital readout on a single silicon chip.