Dipannita Ghosh, Md Ashiqur Rahman, Ali Ashraf, Nazmul Islam
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引用次数: 0
Abstract
Piezoresistive microcantilever sensor is widely used in sensing applications including liquid and gas flow detection. Microcantilevers can function as an embedded system if they are coated with polymers or nanomaterials to improve sensing performance. In this paper, we investigated the performance of piezoresistive microcantilevers (PMC) with and without additional coating. We studied the sensitivity of the PMC sensor after coating it with a three-dimensional porous hydrogel and piezoresistive graphene oxide layer. Hydrogel embedded piezoresistive microcantilever (EPM) showed better results than PMC during solvent sensing application. The resistance change for hydrogel embedded PMC was higher compared to bare PMC by 430% (3.2% to 17%) while detecting isopropyl alcohol (IPA), by approximately 1.5 orders of magnitude (0.19% to 5.7%) while detecting the presence of deionized water. Graphene Oxide coated PMC showed a wider detection range by 30 milliliter/min and 24% better sensitivity than bare PMC during the gas detection experiment. Additionally, we compared the experiment result with COMSOL simulation to develop a model for our embedded PMC sensing. Simulation shows significantly higher deflection of the EPM compared to the bare PMC (66.67% higher while detecting IPA, consistent with the trend observed during the experiment). The facile drop casting-based embedded microcantilever fabrication technique can lead to improved performance in different sensing applications. Our future work will focus on detecting biomolecules by using our constructed embedded systems.
压阻式微悬臂传感器广泛应用于液体和气体的流量检测。微悬臂梁可以作为一个嵌入式系统，如果它们被涂上聚合物或纳米材料，以提高传感性能。在本文中，我们研究了压阻微悬臂梁(PMC)的性能与不附加涂层。我们研究了三维多孔水凝胶和压阻氧化石墨烯涂层后的PMC传感器的灵敏度。水凝胶包埋压阻微悬臂梁(EPM)在溶剂传感应用中表现出比PMC更好的效果。在检测异丙醇(IPA)时，水凝胶包埋的PMC的电阻变化比裸PMC高430%(3.2%至17%)，在检测去离子水时，电阻变化约为1.5个数量级(0.19%至5.7%)。在气体检测实验中，氧化石墨烯涂层PMC的检测范围比裸PMC宽30 ml /min，灵敏度提高24%。此外，我们将实验结果与COMSOL仿真结果进行了比较，以建立我们的嵌入式PMC传感模型。模拟结果表明，与裸PMC相比，EPM的挠度明显更高(检测IPA时高出66.67%，与实验中观察到的趋势一致)。基于快速滴铸的嵌入式微悬臂制造技术可以改善不同传感应用的性能。我们未来的工作将集中在利用我们构建的嵌入式系统检测生物分子。
期刊介绍：
The Journal of Micro and Nano-Manufacturing provides a forum for the rapid dissemination of original theoretical and applied research in the areas of micro- and nano-manufacturing that are related to process innovation, accuracy, and precision, throughput enhancement, material utilization, compact equipment development, environmental and life-cycle analysis, and predictive modeling of manufacturing processes with feature sizes less than one hundred micrometers. Papers addressing special needs in emerging areas, such as biomedical devices, drug manufacturing, water and energy, are also encouraged. Areas of interest including, but not limited to: Unit micro- and nano-manufacturing processes; Hybrid manufacturing processes combining bottom-up and top-down processes; Hybrid manufacturing processes utilizing various energy sources (optical, mechanical, electrical, solar, etc.) to achieve multi-scale features and resolution; High-throughput micro- and nano-manufacturing processes; Equipment development; Predictive modeling and simulation of materials and/or systems enabling point-of-need or scaled-up micro- and nano-manufacturing; Metrology at the micro- and nano-scales over large areas; Sensors and sensor integration; Design algorithms for multi-scale manufacturing; Life cycle analysis; Logistics and material handling related to micro- and nano-manufacturing.
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