MAGNETRON SPUTTER DEPOSITION OF TUNGSTEN COATINGS IN DEUTERIUM-HELIUM MIXTURES

IF 1.6 4区 材料科学 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY High Temperature Materials and Processes Pub Date : 2023-01-01 DOI:10.1615/hightempmatproc.v27.i4.30
M. Kharkov, G.S. Lomonosov, D. Kolodko, M. Kukushkina, A. Kaziev, A. Tumarkin, O. Ogorodnikova
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Abstract

The electrical parameters of a high-power impulse magnetron sputtering (HiPIMS) discharge operating in H2/He mixtures were studied using different values of the pulse width, repetition frequency, and power. Deposition of tungsten (W) coatings was carried out in a magnetron discharge with a thermally insulated W target in two regimes at different pulse widths (80 and 500 µs) and frequencies (2 and 0.5 kHz). The average discharge power was fixed at Pd = 1500 W. Fusion-relevant molecular deuterium/helium (He) and hydrogen/He gas mixtures with a 90/10 flow ratio were used in the experiments.
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磁控溅射沉积氘氦混合物中钨涂层
研究了H2/He混合物中不同脉冲宽度、重复频率和功率下的高功率脉冲磁控溅射放电的电学参数。在不同的脉冲宽度(80µs和500µs)和频率(2和0.5 kHz)下,用磁控管放电对钨(W)涂层进行了沉积。平均放电功率固定在Pd = 1500w。实验采用与聚变相关的分子氘/氦(He)和氢/氦气体混合物,流动比为90/10。
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来源期刊
High Temperature Materials and Processes
High Temperature Materials and Processes 工程技术-材料科学:综合
CiteScore
2.50
自引率
0.00%
发文量
42
审稿时长
3.9 months
期刊介绍: High Temperature Materials and Processes offers an international publication forum for new ideas, insights and results related to high-temperature materials and processes in science and technology. The journal publishes original research papers and short communications addressing topics at the forefront of high-temperature materials research including processing of various materials at high temperatures. Occasionally, reviews of a specific topic are included. The journal also publishes special issues featuring ongoing research programs as well as symposia of high-temperature materials and processes, and other related research activities. Emphasis is placed on the multi-disciplinary nature of high-temperature materials and processes for various materials in a variety of states. Such a nature of the journal will help readers who wish to become acquainted with related subjects by obtaining information of various aspects of high-temperature materials research. The increasing spread of information on these subjects will also help to shed light on relevant topics of high-temperature materials and processes outside of readers’ own core specialties.
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