{"title":"A novel technique for micro profiling of slots","authors":"N. Sivakumar, K. Venkatakrishnan, B. Ngoi","doi":"10.1080/08981500290022761","DOIUrl":null,"url":null,"abstract":"With the growing importance of micro machining, it has become important to characterise the profile of slot surfaces in order to understand the machining process in detail. In this paper, a novel optical layout adapting the concept of Mirau interferometry to polarization optics, in combination with instantaneous phase shifting interferometry, for measurement of slot surfaces is described. Experiments were carried out with this setup on a wafer surface with slot and the results were compared with that of a commercial surface profiler to demonstrate the applicability of the principle. The results obtained, were discussed with reference to the beam spot size, positioning of the object and the vertical resolution of the measurement setup, and compared with that of the commercial surface profiler.","PeriodicalId":49918,"journal":{"name":"Lasers in Engineering","volume":"19 1","pages":"43-52"},"PeriodicalIF":0.6000,"publicationDate":"2002-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Lasers in Engineering","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1080/08981500290022761","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 3
Abstract
With the growing importance of micro machining, it has become important to characterise the profile of slot surfaces in order to understand the machining process in detail. In this paper, a novel optical layout adapting the concept of Mirau interferometry to polarization optics, in combination with instantaneous phase shifting interferometry, for measurement of slot surfaces is described. Experiments were carried out with this setup on a wafer surface with slot and the results were compared with that of a commercial surface profiler to demonstrate the applicability of the principle. The results obtained, were discussed with reference to the beam spot size, positioning of the object and the vertical resolution of the measurement setup, and compared with that of the commercial surface profiler.
期刊介绍：
Lasers in Engineering publishes original (primary) research articles, reviews, short communications and letters on all aspects relating to the application of lasers in the many different branches of engineering and related disciplines.
The topics covered by Lasers in Engineering are the use of lasers: in sensors or measuring and for mapping devices; in electrocomponent fabrication; for materials processing; as integral parts of production assemblies; within the fields of biotechnology and bioengineering; in micro- and nanofabrication; as well as the materials and processing aspects of techniques such as cutting, drilling, marking, cladding, additive manufacturing (AM), alloying, welding and surface treatment and engineering.
Lasers in Engineering presents a balanced account of future developments, fundamental aspects and industrial innovations driven by the deployment of lasers. Modern technology has a vitally important role to play in meeting the increasingly stringent demands made on material and production systems. Lasers in Engineering provides a readily accessible medium for the rapid reporting of new knowledge, and technological and scientific advances in these areas.
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