{"title":"Design MEMS Actuators with Topology Optimization Method","authors":"Kongtian Zuo, Yudong Zhao, Yong-gao Xie, Liping Chen","doi":"10.1109/NEMS.2006.334820","DOIUrl":null,"url":null,"abstract":"Topology optimization method is a novel design method for MEMS actuators. In this paper, a multi-objective design method is introduced into topology optimization for MEMS actuators. Some important factors for multi-objective design of MEMS actuators are deeply researched. A multi-objective topology optimization method based on minimal structural compliance and maximal structural output displacement of MEMS actuators is proposed and the corresponding governing equation for topology optimization is established. A sensitivity analysis of adjoint method is proposed to analyze topology optimization design of multi-objective MEMS actuators. Meanwhile, GCMMA (globally convergent version of the method of moving asymptotes) algorithm is used in optimization. Two numerical examples of MEMS actuators verified the effectiveness of above theory and algorithm","PeriodicalId":6362,"journal":{"name":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"42 1","pages":"1517-1522"},"PeriodicalIF":0.0000,"publicationDate":"2006-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2006.334820","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
Topology optimization method is a novel design method for MEMS actuators. In this paper, a multi-objective design method is introduced into topology optimization for MEMS actuators. Some important factors for multi-objective design of MEMS actuators are deeply researched. A multi-objective topology optimization method based on minimal structural compliance and maximal structural output displacement of MEMS actuators is proposed and the corresponding governing equation for topology optimization is established. A sensitivity analysis of adjoint method is proposed to analyze topology optimization design of multi-objective MEMS actuators. Meanwhile, GCMMA (globally convergent version of the method of moving asymptotes) algorithm is used in optimization. Two numerical examples of MEMS actuators verified the effectiveness of above theory and algorithm
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