Measurement of surface roughness with small waviness by contact stylus instrument correcting specimen orientation

Abstract

This paper presents the new technique to measure the surface roughness profiles correcting an orientation of specimen surface in one operation. The contact stylus profilometer is equipped with the table whose inclination is controlled by the computer. The positioning of the stylus tip in the vertical direction is corrected at the same time. For assuring to measure profiles in length of 5.6mm, the surface profile data for control is demanded to be obtained in the length of 1mm. This measuring length varies depending on form errors such as the waviness. Then this paper gives the new technique to correspond the above-mentioned problem.