Weiting Chen, K. Ogiwara, 荻原 公平, Koichiro Koge, 神家 幸一郎, K. Tomita, 冨田 健太郎, K. Uchino, 内野 喜一郎, Y. Kawai, 河合 良信, コウヘイ ハギワラ, コウイチロウ コウゲ, ケンタロウ トミタ, キイチロウ ウチノ, ヨシノブ カワイ
{"title":"Investigation of VHF Argon Plasma at High Pressure by Balanced Power Feeding Using Laser Thomson Scattering","authors":"Weiting Chen, K. Ogiwara, 荻原 公平, Koichiro Koge, 神家 幸一郎, K. Tomita, 冨田 健太郎, K. Uchino, 内野 喜一郎, Y. Kawai, 河合 良信, コウヘイ ハギワラ, コウイチロウ コウゲ, ケンタロウ トミタ, キイチロウ ウチノ, ヨシノブ カワイ","doi":"10.15017/1397755","DOIUrl":null,"url":null,"abstract":"The dependences of the VHF plasma parameters on the gas pressure and power were examined by using the Laser Thomson scattering method, where the VHF plasma was produced in the high pressure region by the balanced power feeding method. It was found that the balanced power feeding method provides a high electron density plasma with low electron temperature at high pressures. This characteristics were confirmed by calculations using a 2-dimensional simulation code.","PeriodicalId":11722,"journal":{"name":"Engineering sciences reports, Kyushu University","volume":"67 1","pages":"6-11"},"PeriodicalIF":0.0000,"publicationDate":"2013-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Engineering sciences reports, Kyushu University","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.15017/1397755","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The dependences of the VHF plasma parameters on the gas pressure and power were examined by using the Laser Thomson scattering method, where the VHF plasma was produced in the high pressure region by the balanced power feeding method. It was found that the balanced power feeding method provides a high electron density plasma with low electron temperature at high pressures. This characteristics were confirmed by calculations using a 2-dimensional simulation code.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
