A Density Staggered Cantilever for Micron Length Gravity Probing

Qidong Wang, Alexander D. Rider, D. Moore, Charles P. Blakemore, Liqiang Cao, G. Gratta
{"title":"A Density Staggered Cantilever for Micron Length Gravity Probing","authors":"Qidong Wang, Alexander D. Rider, D. Moore, Charles P. Blakemore, Liqiang Cao, G. Gratta","doi":"10.1109/ECTC.2017.274","DOIUrl":null,"url":null,"abstract":"A density staggered cantilever was developed to measure the micron length gravity between itself and an optically levitated microsphere in high vacuum. The cantilever, has two main density contrasted materials gold(19.3g/cm3) and silicon(2.33g/cm3), where each of the material is finger-shaped and stagger placed next to each other, constitute an integral finger array on the device layer of SOI wafer. The scallop of the DRIE defined fingers was optimized to be less than 50nm to reduce the surface variation between the cantilever and levitated microsphere. The end of each fingers were covered with 2-10um silicon and gold to shield the undesired charged particles. The back side of SOI wafer were defined with DRIE to release the cantilever. The Cantilever will be placed microns away from the microsphere and mechanically move back and forth to interact with the microsphere. This paper introduces the design, manufacturing of the density staggered cantilever for micron length gravity.","PeriodicalId":6557,"journal":{"name":"2017 IEEE 67th Electronic Components and Technology Conference (ECTC)","volume":"9 3 1","pages":"1773-1778"},"PeriodicalIF":0.0000,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 IEEE 67th Electronic Components and Technology Conference (ECTC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ECTC.2017.274","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5

Abstract

A density staggered cantilever was developed to measure the micron length gravity between itself and an optically levitated microsphere in high vacuum. The cantilever, has two main density contrasted materials gold(19.3g/cm3) and silicon(2.33g/cm3), where each of the material is finger-shaped and stagger placed next to each other, constitute an integral finger array on the device layer of SOI wafer. The scallop of the DRIE defined fingers was optimized to be less than 50nm to reduce the surface variation between the cantilever and levitated microsphere. The end of each fingers were covered with 2-10um silicon and gold to shield the undesired charged particles. The back side of SOI wafer were defined with DRIE to release the cantilever. The Cantilever will be placed microns away from the microsphere and mechanically move back and forth to interact with the microsphere. This paper introduces the design, manufacturing of the density staggered cantilever for micron length gravity.
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微米长度重力探测的密度交错悬臂
研制了一种密度交错悬臂梁,用于测量其自身与高真空光学悬浮微球之间微米长度的重力。悬臂,有两种主要的密度对比材料金(19.3g/cm3)和硅(2.33g/cm3),其中每一种材料都是手指状的,彼此交错放置,在SOI晶圆的器件层上构成一个完整的手指阵列。为了减小悬臂和悬浮微球之间的表面变化,将DRIE定义的手指扇形优化为小于50nm。每个手指的末端都覆盖上2-10um的硅和金,以屏蔽不需要的带电粒子。SOI硅片的背面用DRIE进行了定义,以释放悬臂。悬臂将被放置在距离微球几微米远的地方,并机械地来回移动以与微球相互作用。介绍了微米长度重力密度交错悬臂梁的设计、制造。
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