Temperature Difference Measurement Across Mems Based Nanogap Created by Cleavage of Silicon for Thermionic Generation

Abstract

Thermionic generation using nanogaps may use for energy harvesting at room temperature. Thermionic generation requires nanogap with a gap distance of several nm to several tens nm, and it is desirable that the opposing surfaces of the gap be parallel and smooth with a large area. We fabricated a 57 nm nanogap of 21.6(4.32×5.0) μm2 by cleaving a single crystal silicon beam installed in MEMS and measured the temperature difference between gap by Raman microscopy. In the experiment, the heat transfer via nanogap was confirmed to be very small.