F. Galeotti, I. S. Vollenbroek, M. Petruzzella, F. Pagliano, F. V. van Otten, Ž. Zobenica, H. S. Marnani, A. Mohtashami, R. W. van der Heijden, A. Fiore
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引用次数: 1
Abstract
A nano-opto-electro-mechanical transducer for displacement sensing is presented. It consists of a double-membrane photonic crystal cavity integrated with electro-optical read-out and on-chip light-delivery. The operation is demonstrated by atomic force microscope actuation and photocurrent sensing.
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