Super hydrophobic/super hydrophilic transparent nanostructured glass fabricated by wet etching

Amarendra Kumar, Kunal Kashyap, K. Liao, M. T. Hou, J. Yeh
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Abstract

Glass nanostructures were fabricated by wet chemical etching instead of using the complicated nanolithography and expensive dry etching process. Super hydrophilic glass with contact angle of 1° was created using this nanostructure with 92% transparency. Self-assembled monolayer of Perfluorodecyl-trichlorosilane (FDTS) was used to further make the glass super hydrophobic with contact angle of 151° without affecting its transparency. Polysilicon layer of 300 nm was deposited on glass substrate first and nanostructures were fabricated in this layer by metal assisted wet chemical etching. Thermal oxidation converted the silicon nanostructure to silicon dioxide nanostructure. This technology is producible on mass scale and useful in preparation of anti-fogging and self-cleaning glass.
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湿法蚀刻制备超疏水/超亲水透明纳米结构玻璃
采用湿法化学蚀刻技术制备玻璃纳米结构,取代了复杂的纳米光刻工艺和昂贵的干法蚀刻工艺。利用该纳米结构制备了接触角为1°的超亲水性玻璃,透明度为92%。采用全氟癸基-三氯硅烷(FDTS)自组装单层进一步制备了接触角为151°的超疏水玻璃,且不影响其透明度。首先在玻璃基板上沉积了300 nm的多晶硅层,并通过金属辅助湿法化学刻蚀在该层上制备了纳米结构。热氧化将硅纳米结构转化为二氧化硅纳米结构。该工艺可大规模生产,可用于制备防雾自洁玻璃。
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