Resonant MEMS for Gas Detection Based on the Measurements of Physical Properties of Gas Mixtures

I. Dufour, Luis Iglesias Hernandez, P. Shanmugam, J. Michaud, D. Alquier, D. Certon, María D. Manrique-Juárez, T. Leïchlé, F. Mathieu, L. Mazenq, L. Nicu
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引用次数: 1

Abstract

Principles of gas detection using either resonant microcantilevers or CMUTs without sensitive coating are presented. The different principles which have been tested for hydrogen detection are based on the use of electrical measurements to estimate physical gas properties (mass density, viscosity, sound velocity).
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基于混合气体物理性质测量的谐振MEMS气体检测
介绍了利用谐振微悬臂梁或无敏感涂层的cmut进行气体检测的原理。已经测试的用于氢气探测的不同原理是基于使用电测量来估计气体的物理性质(质量密度、粘度、声速)。
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