A novel low thermal budget thin-film polysilicon fabrication process for large-area, high-throughput solar cell production

Abstract

A novel thin-film poly-Si fabrication process has been demonstrated. This low thermal budget process transforms the multilayer amorphous silicon thin film stack into a poly-Si stack in one simple step over a very short period of time without deteriorating the underneath glass substrate. The experimental result of the unique vertical crystallization process including the mechanism is discussed. Influences of the dopant type and process parameters on crystal structure will be revealed. This new process potentially enables the economic production of large-area thin-film poly-Si solar cells at a high throughput.