{"title":"Measurement of complex optical constant using terahertz ellipsometry","authors":"T. Nagashima, M. Hangyo","doi":"10.1109/ICIMW.2002.1076176","DOIUrl":null,"url":null,"abstract":"We have proposed and developed \"terahertz ellipsometry\" in which ellipsometry is applied to time-domain spectroscopy in the THz frequency region. In this paper, the complex optical constants of highly doped semiconductors obtained by terahertz ellipsometry are shown. In addition, the incident angle dependence of the measurement precision is discussed.","PeriodicalId":23431,"journal":{"name":"Twenty Seventh International Conference on Infrared and Millimeter Waves","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2002-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Twenty Seventh International Conference on Infrared and Millimeter Waves","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIMW.2002.1076176","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We have proposed and developed "terahertz ellipsometry" in which ellipsometry is applied to time-domain spectroscopy in the THz frequency region. In this paper, the complex optical constants of highly doped semiconductors obtained by terahertz ellipsometry are shown. In addition, the incident angle dependence of the measurement precision is discussed.
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