Ultra-high resolution electron microscopy

IF 19 1区 物理与天体物理 Q1 PHYSICS, MULTIDISCIPLINARY Reports on Progress in Physics Pub Date : 2017-02-01 DOI:10.1088/1361-6633/80/2/026101
M. Oxley, A. Lupini, S. Pennycook
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引用次数: 23

Abstract

The last two decades have seen dramatic advances in the resolution of the electron microscope brought about by the successful correction of lens aberrations that previously limited resolution for most of its history. We briefly review these advances, the achievement of sub-Ångstrom resolution and the ability to identify individual atoms, their bonding configurations and even their dynamics and diffusion pathways. We then present a review of the basic physics of electron scattering, lens aberrations and their correction, and an approximate imaging theory for thin crystals which provides physical insight into the various different imaging modes. Then we proceed to describe a more exact imaging theory starting from Yoshioka’s formulation and covering full image simulation methods using Bloch waves, the multislice formulation and the frozen phonon/quantum excitation of phonons models. Delocalization of inelastic scattering has become an important limiting factor at atomic resolution. We therefore discuss this issue extensively, showing how the full-width-half-maximum is the appropriate measure for predicting image contrast, but the diameter containing 50% of the excitation is an important measure of the range of the interaction. These two measures can differ by a factor of 5, are not a simple function of binding energy, and full image simulations are required to match to experiment. The Z-dependence of annular dark field images is also discussed extensively, both for single atoms and for crystals, and we show that temporal incoherence must be included accurately if atomic species are to be identified through matching experimental intensities to simulations. Finally we mention a few promising directions for future investigation.
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超高分辨率电子显微镜
在过去的二十年里,电子显微镜的分辨率取得了巨大的进步,这是由于成功地校正了透镜像差,而在电子显微镜的历史上,透镜像差在很大程度上限制了分辨率。我们简要回顾了这些进展,亚-Ångstrom分辨率的成就和识别单个原子,它们的键构型甚至它们的动力学和扩散途径的能力。然后,我们回顾了电子散射的基本物理,透镜像差及其校正,以及薄晶体的近似成像理论,为各种不同的成像模式提供了物理见解。然后,我们从Yoshioka的公式出发,描述了一个更精确的成像理论,涵盖了使用Bloch波,多层公式和声子模型的冻结声子/量子激发的全图像模拟方法。非弹性散射的离域已成为原子分辨率的重要限制因素。因此,我们广泛地讨论了这个问题,展示了全宽度-半最大值是如何预测图像对比度的适当度量,但包含50%激发的直径是相互作用范围的重要度量。这两个测量值相差5倍,不是简单的结合能函数,需要全图像模拟来匹配实验。对于单原子和晶体,环形暗场图像的z依赖性也进行了广泛的讨论,并且我们表明,如果要通过匹配实验强度来识别原子种类,必须准确地包括时间非相干性。最后提出了未来研究的几个方向。
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来源期刊
Reports on Progress in Physics
Reports on Progress in Physics 物理-物理:综合
CiteScore
31.90
自引率
0.00%
发文量
45
审稿时长
6-12 weeks
期刊介绍: Reports on Progress in Physics is a highly selective journal with a mission to publish ground-breaking new research and authoritative invited reviews of the highest quality and significance across all areas of physics and related areas. Articles must be essential reading for specialists, and likely to be of broader multidisciplinary interest with the expectation for long-term scientific impact and influence on the current state and/or future direction of a field.
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