S. Jayhooni, B. Assadsangabi, G. Hohert, P. Lane, H. Zeng, K. Takahata
{"title":"High-Speed and Stepping MEMS Rotary Actuator for Multimodal, 360° Side-Viewing Endoscopic Probes","authors":"S. Jayhooni, B. Assadsangabi, G. Hohert, P. Lane, H. Zeng, K. Takahata","doi":"10.1109/MEMS46641.2020.9056226","DOIUrl":null,"url":null,"abstract":"This paper reports, for the first time, a MEMS rotary actuator that enables side-viewing microendoscopic probes with different modalities for luminal tissue analysis. The developed tubular-form micro rotary actuator offers both high-speed and stepping motions that are compatible with the use for optical coherence tomography (OCT) and Raman spectroscopy, respectively. The actuator, improved from its preceding designs, shows up to 125× higher revolution speeds per power while enabling arbitrary angle-resolved stepping rotations in a ∼50% thinner body, with significantly reduced heating effect for biologically safe operation in vivo. Preliminary testing of the OCT endoscopic probe integrated with the developed rotary actuator/scanner successfully demonstrates real-time 360° imaging of live human skin tissue.","PeriodicalId":6776,"journal":{"name":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"75 1","pages":"376-379"},"PeriodicalIF":0.0000,"publicationDate":"2020-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMS46641.2020.9056226","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
This paper reports, for the first time, a MEMS rotary actuator that enables side-viewing microendoscopic probes with different modalities for luminal tissue analysis. The developed tubular-form micro rotary actuator offers both high-speed and stepping motions that are compatible with the use for optical coherence tomography (OCT) and Raman spectroscopy, respectively. The actuator, improved from its preceding designs, shows up to 125× higher revolution speeds per power while enabling arbitrary angle-resolved stepping rotations in a ∼50% thinner body, with significantly reduced heating effect for biologically safe operation in vivo. Preliminary testing of the OCT endoscopic probe integrated with the developed rotary actuator/scanner successfully demonstrates real-time 360° imaging of live human skin tissue.