A batch-fabricated non-reverse valve with cantilever beam manufactured by micromachining of silicon

Abstract

A batch-fabricated non-reverse valve has been manufactured in silicon with micromachining tools, i.e., electrochemical doping-selective etching in KOH and anisotropic etching in EDP. The valve simply consists of a cantilever beam that can take two positions, one letting a gas or a fluid through the valve, the other forced by the pressure to close on of the two inlet holes.

The valve features fast response, small size, batch manufacturing and small dead volumes, and also shows an application of the mechanical strength of silicon. A simple theory is used to predict the basic characteristics of the valve.