3-D Profile Parallel Detecting System Based on Differential Confocal Microscopy

Abstract

Based on the differential confocal microscopy method, a nonscanning 3D profile detecting system is presented. In the detecting system, a 2D light source array produced by the microoptic component is used to form a parallel microconfocal system. Wholefield detection of the measuring plane is realized simultaneously. In the system the reflected light beam was divided into two paths, and two CCD cameras detected the facula array synchronistically in a differential arrangement. Because the differential arithmetic of facula intensity is used, the noise and the shift of light source can be restrained effectively. By means of the linearity characteristic of the differential confocal system, the high axial resolution is achieved at a larger sampling interval. The measuring efficiency and accuracy are increased simultaneously. The experment result proved the reliability of the detecting system.