High Q SpiritTM laser systems for industrial micro-processing applications

V. Matylitsky, F. Hendricks, J. Aus der Au
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Abstract

Unique advantage of solid material processing with femtosecond lasers is high ablation efficiency and processing accuracy. We will show aspects of HighQ SpiritTM femtosecond laser system performance and give overview of its actual applications.
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用于工业微加工应用的高Q SpiritTM激光系统
飞秒激光加工固体材料的独特优点是烧蚀效率高,加工精度高。我们将展示HighQ SpiritTM飞秒激光系统性能的各个方面,并对其实际应用进行概述。
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