{"title":"Deposition of DLC Films using Intense Pulsed Beam in Plasma Focus Device","authors":"Hiroaki Ito, Y. Nakata, Zhiping Wang","doi":"10.1541/IEEJFMS.137.559","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":23081,"journal":{"name":"The transactions of the Institute of Electrical Engineers of Japan.A","volume":"21 1","pages":"559-563"},"PeriodicalIF":0.0000,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The transactions of the Institute of Electrical Engineers of Japan.A","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1541/IEEJFMS.137.559","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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