Yuki Adachi, Yifan Xiong, Hanqiao Ye, R. Zuo, Masaya Morita, K. Kaichi, Ryosei Kinoshita, M. Morifuji, A. Maruta, H. Kajii, M. Kondow
{"title":"Advanced dry etching of GaAs/AlGaAs multilayer wafer with InAs quantum dot for circular defect in photonic crystal laser","authors":"Yuki Adachi, Yifan Xiong, Hanqiao Ye, R. Zuo, Masaya Morita, K. Kaichi, Ryosei Kinoshita, M. Morifuji, A. Maruta, H. Kajii, M. Kondow","doi":"10.1587/elex.20.20230054","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":13437,"journal":{"name":"IEICE Electron. Express","volume":"76 1","pages":"20230054"},"PeriodicalIF":0.0000,"publicationDate":"2023-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEICE Electron. Express","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1587/elex.20.20230054","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}