M. Ebermann, N. Neumann, S. Hoppe, K. Hiller, J. Seiler, C. Helke, M. Meinig, S. Kurth
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Abstract
This paper reports on the progress in miniaturization of bulk micromachined FP filters and tunable detector modules for the mid infrared. The chip size was reduced from 7×7 mm² to 5×5 mm², enabling integration into TO5-size detector packages, which is about only one quarter of the formerly used TO8. At the same time a high optical throughput is maintained. A MEMS design with two movable reflectors is used, which allows for lower actuation voltages and provides negligible acceleration sensitivity.
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