Femtogram scale nano-optomechanical resonators in water

He Zhang, J. Xia
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Abstract

A femtogram scale nanobeam optomechanical crystal (OMC) resonator operating in water is designed and demonstrated. The thermomechanical motion of the highly damped mechanical resonance in water can be resolved by the sensitive cavity optomechanical readout. The present device has an estimated mass sensitivity at the attogram level (1.33 ag/VHz) in water. A silicon nitride nanobeam OMC resonator with high optical Q-factor operating at visible wavelength is designed to improve the mass sensitivity.
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水中飞图级纳米光机械谐振器
设计并演示了一种在水中工作的飞图级纳米光机械晶体(OMC)谐振器。高阻尼机械共振在水中的热机械运动可以通过灵敏腔光机械读数来分辨。本装置在水中的估计质量灵敏度为阿图克级(1.33 ag/VHz)。为了提高质量灵敏度,设计了一种工作在可见光波段的高光学q因子氮化硅纳米束OMC谐振器。
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