Ryoma Miyake, M. Kiuchi, S. Yoshida, Shuji Tanaka, G. Fox
{"title":"Commercial Production of Epitaxial PZT for Piezoelectric MEMS Applications","authors":"Ryoma Miyake, M. Kiuchi, S. Yoshida, Shuji Tanaka, G. Fox","doi":"10.1109/IFCS-ISAF41089.2020.9234898","DOIUrl":null,"url":null,"abstract":"A commercially produced monocrystalline-like epitaxial PZT film is described for piezoelectric MEMS applications. Films with a thickness of $1\\ \\mu \\mathrm{m}$ to $2\\ \\mu \\mathrm{m}$ exhibit a typical transverse piezoelectric d31 coefficient of −185 pm/V, relative dielectric permittivity of 430 and dielectric loss of 0.015. These films are commercially available for piezoelectric MEMS device development and production.","PeriodicalId":6872,"journal":{"name":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","volume":"27 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2020-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IFCS-ISAF41089.2020.9234898","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
A commercially produced monocrystalline-like epitaxial PZT film is described for piezoelectric MEMS applications. Films with a thickness of $1\ \mu \mathrm{m}$ to $2\ \mu \mathrm{m}$ exhibit a typical transverse piezoelectric d31 coefficient of −185 pm/V, relative dielectric permittivity of 430 and dielectric loss of 0.015. These films are commercially available for piezoelectric MEMS device development and production.
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