Manufacturing of capacitive electrodes on Si-substrate for electrophysiological applications

Abstract

The usual electrodes from electrophysiology are resistive. A variable metal-skin contact resistance frequently generates unpleasant artifacts. The capacitive electrodes avoid this disadvantage and are suitable for variable biosignals recording. The main novelty of this paper is the manufacturing of capacitive electrodes with all terminals on the top surface, letting free the electrode bottom for physiological preparations. So, the paper firstly presents the TCAD techniques used for the design of some capacitive electrode using three mask levels. By EDA, L-EDIT tools, the layers that constitute the fabrication masks are transferred to the glass support. In the last part, the electrodes technological flow design and testing in a real electrophysiological platform using the capacitive electrodes, are presented.