Simple Method for Fabrication of Light Diffraction Gratings from Ultraviolet to Infrared

A. Hernández, R. Asomoza-Palacio, Y. Kudriavtsev
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Abstract

Periodical structures with a wave-like shape were fabricated on semiconductors surfaces by utilizing ion milling from a Liquid Metal Ion Gun (LMIG) of bismuth. The symmetrical structures exhibit a well-defined shape and uniformity all over the irradiated area. Wavelength and amplitude of the ripples can be modified by varying the number of pixels and ion fluence, respectively. It was found that the ripples have potential applications as diffraction gratings for visible light. Furthermore, is possible to modify the wavelength of the gratings for applications in the range of infrared and ultra violet, this can be done by selecting the appropriate ion beam diameter. In this work, several gratings were fabricated on Si, Ge and ZnSe surfaces with a wavelength ranging from 294 nanometers up to 4.7 micrometers. A simple and accurate method for fabrication of light diffraction gratings is suggested.
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紫外至红外光衍射光栅的简易制作方法
利用铋液态金属离子枪(LMIG)的离子铣削技术,在半导体表面制备了具有波浪形的周期结构。对称结构在整个辐照区均表现出良好的形状和均匀性。波纹的波长和振幅可以分别通过改变像素的数量和离子的影响来改变。结果表明,该波纹具有作为可见光衍射光栅的潜在应用价值。此外,可以通过选择适当的离子束直径来修改光栅的波长,以适应红外和紫外线的应用范围。在这项工作中,在Si, Ge和ZnSe表面上制作了几个波长从294纳米到4.7微米的光栅。提出了一种制作光衍射光栅的简单而精确的方法。
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