Ken Lee, Min Sung Kim, Peter Shim, Ica Han, Jack Lee, Jeffery Chun, Samuel Cha
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引用次数: 6
Abstract
The increasing level of integration in electronic devices requires high density package substrates with good electrical and thermal performance, and high reliability. Organic laminate substrates have been serving these requirements with their continuous improvements in terms of the material characteristics and fabrication process to realize multi-layer fine pattern interconnects and small form factor. We present the advanced coreless laminate substrates in this paper including 3-layer thin substrate built by ETS (Embedded Trace Substrate) technology, 3-layer SUTC (Simmtech Ultra-Thin substrate with Carrier) for fan-out chip last package, and 3-layer coreless substrate with HSR (High modulus Solder Resist) for reduced warpage. We also present new coreless substrates up to 10 layers and substrate based on EMC. These new laminate substrates are used in many different applications such as application processors, memory, CMOS image sensors, touch screen controllers, MEMS, and RF SIP(System in Package) for over 70GHz applications. One common challenge for all these substrates is to minimize the warpage. The analysis and simulation techniques for the warpage control are presented.
电子器件的集成化水平不断提高,需要高密度的封装基板,具有良好的电气和热性能,以及高可靠性。有机层压基板在材料特性和制造工艺方面不断改进,以实现多层精细互连和小尺寸,从而满足了这些要求。我们在本文中介绍了先进的无芯层压基板,包括采用ETS(嵌入式跟踪基板)技术构建的3层薄基板,用于扇出芯片最后封装的3层SUTC(带载波的Simmtech超薄基板),以及用于减少翘曲的3层无芯基板(高模量阻焊剂)。我们还提出了多达10层的新型无芯基板和基于EMC的基板。这些新的层压板基板用于许多不同的应用,如应用处理器、存储器、CMOS图像传感器、触摸屏控制器、MEMS和用于超过70GHz应用的RF SIP(System in Package)。所有这些基板的一个共同挑战是尽量减少翘曲。介绍了翘曲控制的分析与仿真技术。