Katja Meinel, C. Stoeckel, M. Melzer, S. Zimmermann, R. Forke, K. Hiller, T. Otto
{"title":"Piezoelectric Scanning Micromirror with Large Scan Angle Based on Thin Film Aluminum Nitride","authors":"Katja Meinel, C. Stoeckel, M. Melzer, S. Zimmermann, R. Forke, K. Hiller, T. Otto","doi":"10.1109/TRANSDUCERS.2019.8808723","DOIUrl":null,"url":null,"abstract":"In this paper micromirrors based on piezoelectric thin film aluminum nitride (AlN) are presented. The microsystems with a 6 mm² footprint are fabricated successfully in 150 mm SOI technology. A large tilt angle is achieved by FEM-based optimization of the lever arm parameters. Three micromirror types with varied spring widths are characterized, achieving tilt angles up to 51.3° at 1.9 kHz, 31.6° at 4.6 kHz, and 16.5° at 12.5 kHz for an actuation voltage of less than 5 V. For higher actuation voltages up to 20 V, a maximum scan angle of 104.9° is reached, limited by the measurement setup.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"19 1","pages":"1518-1521"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"10","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2019.8808723","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 10
Abstract
In this paper micromirrors based on piezoelectric thin film aluminum nitride (AlN) are presented. The microsystems with a 6 mm² footprint are fabricated successfully in 150 mm SOI technology. A large tilt angle is achieved by FEM-based optimization of the lever arm parameters. Three micromirror types with varied spring widths are characterized, achieving tilt angles up to 51.3° at 1.9 kHz, 31.6° at 4.6 kHz, and 16.5° at 12.5 kHz for an actuation voltage of less than 5 V. For higher actuation voltages up to 20 V, a maximum scan angle of 104.9° is reached, limited by the measurement setup.
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