K. Zang, Xiao Jiang, Y. Huo, Tianzhe Zheng, Yueyang Fei, Xun Ding, M. Morea, M. Xue, Ching-Ying Lu, T. Kamins, Qiang Zhang, Jian-Wei Pan, J. Harris
{"title":"Enhanced silicon single-photon avalanche diode based on light trapping","authors":"K. Zang, Xiao Jiang, Y. Huo, Tianzhe Zheng, Yueyang Fei, Xun Ding, M. Morea, M. Xue, Ching-Ying Lu, T. Kamins, Qiang Zhang, Jian-Wei Pan, J. Harris","doi":"10.1364/CLEO_SI.2018.STU3A.3","DOIUrl":null,"url":null,"abstract":"We present a nano-structured light-trapping Si SPAD with improved detection efficiency, without sacrificing jitter distribution or dark count rate. The design can be adopted for CMOS-compatible SPAD image sensors and silicon photomultipliers.","PeriodicalId":6498,"journal":{"name":"2018 Conference on Lasers and Electro-Optics (CLEO)","volume":"321 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2018-05-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 Conference on Lasers and Electro-Optics (CLEO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/CLEO_SI.2018.STU3A.3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We present a nano-structured light-trapping Si SPAD with improved detection efficiency, without sacrificing jitter distribution or dark count rate. The design can be adopted for CMOS-compatible SPAD image sensors and silicon photomultipliers.