{"title":"Nanorobotic processing of graphene for rapid device prototyping","authors":"S. Zimmermann, S. A. Barragan, S. Fatikow","doi":"10.1109/NEMS.2014.6908807","DOIUrl":null,"url":null,"abstract":"This paper presents a nanorobotic platform tailored for rapid prototyping of graphene based devices. Applying the capabilities of this platform, a nanorobotic strategy is proposed that enables the identification, electrical characterization and integration of graphene into device structures without using any time-consuming lithography procedures. In this way, graphene based devices can be fabricated and classified within few hours, significantly reducing the effort and consequently the costs of device prototyping. As an example of this strategy, graphene flakes are characterized and subsequently transferred onto trench structures resulting in partially suspended areas suitable to study graphene based nanoelectromechanical systems.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"32 1","pages":"275-280"},"PeriodicalIF":0.0000,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2014.6908807","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
This paper presents a nanorobotic platform tailored for rapid prototyping of graphene based devices. Applying the capabilities of this platform, a nanorobotic strategy is proposed that enables the identification, electrical characterization and integration of graphene into device structures without using any time-consuming lithography procedures. In this way, graphene based devices can be fabricated and classified within few hours, significantly reducing the effort and consequently the costs of device prototyping. As an example of this strategy, graphene flakes are characterized and subsequently transferred onto trench structures resulting in partially suspended areas suitable to study graphene based nanoelectromechanical systems.