Design and Fabrication of A Film Transducer with Composite Microstructures for IR Scene Projection

Abstract

A MEMS film transducer used for infrared scene projection was reported. It can absorb the heat of an incident visible image and convert it into an infrared image. The transducer was designed as a thin self-suspended polyimide film with periodic composite microstructure arrays of $1300\times 1300$ and high absorption of 95% in visible wavelength range. The large arrays fabricated by MEMS processes were used to limit in-plane thermal diffusion and enhance radiation spatial resolution. Based on the transducer, high equivalent blackbody temperature of 550 K was obtained at a laser power density of 1.4 W/cm2. Linear radiation power density could be controlled. High resolution infrared images were successfully generated in dual infrared bands of 3-5 and 8-12μm. These results proved the MEMS film transducer was a promising candidate in the large-scale dual-band infrared scene projection.