Laser synthesis of silicon carbide powders from silane and hydrocarbon mixtures

Abstract

Ultrafine silicon carbide powders have been synthesized from mixtures of silane and hydrocarbons (with one to four carbon atoms) irradiated with an unfocused, high-power (1 kW), continuous-wave industrial CO{sub 2} laser. The chemistry of the reaction has been determined by analysis of the gaseous phase, either by infrared spectroscopy or by combined-gas chromatography-mass spectrometry; reaction yields have been determined. A silicon carbide production rate of 30 g/h with a yield > 99% was obtained from silane and acetylene mixtures with a 600-W laser power. An attempt to approach a production rate of 100 g/h at laboratory scale has been successful. Powder characteristics, such as particle size (10 to 50 nm), crystallinity, and stoichiometry can be controlled through optimization of laser intensity, gas pressure, and flow rate. The powders consist of equiaxed particles which exhibit a narrow size distribution.