Effect of tool shape and tool feed rate on the machined profile of a quartz substrate using an electrochemical discharge machining process

S. Saranya, A. Sankar
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引用次数: 14

Abstract

Electro-chemical discharge machining (ECDM) is a recent technique used to machine insulating materials like glass and ceramics. This paper presents the results of the combined effects of tool feed-rate and tool shape on the micro-machining of a quartz substrate using an ECDM process. The investigations show that a tool with a spherical tip provides a profile with a reduced entrance diameter and the overcut can be considerably reduced by controlling the tool feed-rate.
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刀具形状和刀具进给速度对电化学放电加工石英基板加工轮廓的影响
电化学放电加工(ECDM)是一种用于加工玻璃和陶瓷等绝缘材料的新技术。本文介绍了刀具进给速度和刀具形状对采用ECDM工艺加工石英基板微加工的综合影响。研究表明,采用球面尖端的刀具可以减小切削齿的入口直径,并且通过控制刀具进给速度可以大大减少过切。
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