Low Temperature Ni/Sn/Ni Transient Liquid Phase Bonding for High Temperature Packaging Applications by Imposing Temperature Gradient

Y. Zhong, N. Zhao, H. T. Ma, W. Dong, M. Huang, C. Wong
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引用次数: 1

Abstract

With regulations mandating industry toward Pb-free solders in all electronics, the development of interconnecting materials capable of withstanding harsh thermal conditions becomes one of the key technological elements for the development of next generation wide band-gap semiconductors. By reflowing Ni/Sn/Ni interconnects under temperature gradient, a new transient liquid phase (TLP) bonding process is proposed for high temperature packaging applications in this study. The evolution of the dominant Ni3Sn4 intermetallic compounds (IMCs) depends strongly on temperature gradient. The essential cause of such dependence is attributed to the different amounts of Ni atomic fluxes being introduced into the interfacial reaction between the new and conventional TLP bonding processes. Under the effect of temperature gradient, mass thermomigration of Ni atoms from the hot end toward the cold end promotes the total Ni atomic flux for interfacial reaction. As a result, the total growth of IMCs is significantly accelerated. The new TLP bonding process consumes limited cold end Ni substrate. The mechanism for the new TLP bonding process is discussed and experimentally verified in this study.
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施加温度梯度的低温Ni/Sn/Ni瞬态液相键合用于高温封装
随着法规要求行业在所有电子产品中使用无铅焊料,开发能够承受恶劣热条件的互连材料成为开发下一代宽带隙半导体的关键技术要素之一。本研究提出了一种新的瞬态液相(TLP)键合工艺,通过在温度梯度下回流Ni/Sn/Ni互连,用于高温封装。优势Ni3Sn4金属间化合物(IMCs)的演化与温度梯度密切相关。产生这种依赖性的根本原因是在新的和传统的TLP键合过程之间的界面反应中引入了不同数量的Ni原子通量。在温度梯度的作用下,Ni原子从热端向冷端质量热迁移,促进了界面反应的Ni原子总通量。因此,集成营销中心的总体增长明显加快。新的TLP键合工艺消耗有限的冷端Ni衬底。本文讨论了新型TLP键合过程的机理,并进行了实验验证。
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