{"title":"Differential π-shaped CMUTs with improved linearity and sensitivity","authors":"Teng-Chuan Cheng, T. Tsai","doi":"10.1109/ICCE-TW.2016.7520986","DOIUrl":null,"url":null,"abstract":"High performance π-shaped capacitive micro-machined ultrasonic transducers (CMUTs) are presented with improved linearity and sensitivity. The π-shaped CMUT is composed of an anchor membrane, a circular piston electrode plate, and a bridging layer. The proposed differential π-shaped CMUT can provide differential output signals and further increase the sensitivity by about 6 dB. Both π-shaped CMUTs were designed and verified in a TSMC 1P6M 180nm CMOS MEMS technology. Experimental results show that the differential π-shaped CMUT not only provides superior linearity under 0-0.6 MPa pressure, but also exhibits 1.6 and 2.46 times in sensitivity compared to the conventional CMUT architecture.","PeriodicalId":6620,"journal":{"name":"2016 IEEE International Conference on Consumer Electronics-Taiwan (ICCE-TW)","volume":"26 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2016-05-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE International Conference on Consumer Electronics-Taiwan (ICCE-TW)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICCE-TW.2016.7520986","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
High performance π-shaped capacitive micro-machined ultrasonic transducers (CMUTs) are presented with improved linearity and sensitivity. The π-shaped CMUT is composed of an anchor membrane, a circular piston electrode plate, and a bridging layer. The proposed differential π-shaped CMUT can provide differential output signals and further increase the sensitivity by about 6 dB. Both π-shaped CMUTs were designed and verified in a TSMC 1P6M 180nm CMOS MEMS technology. Experimental results show that the differential π-shaped CMUT not only provides superior linearity under 0-0.6 MPa pressure, but also exhibits 1.6 and 2.46 times in sensitivity compared to the conventional CMUT architecture.
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