$0.0062\ {}^{\circ}/\sqrt{hr}$ Angle Random Walk and $0.027\ {}^{\circ}/hr$ Bias Instability from a Micro-Shell Resonator Gyroscope with Surface Electrodes

Abstract

This paper reports measured results for a fused-silica precision shell integrating (PSI) micro gyroscope employing out-of-plane drive/sense transduction mechanism. The PSI gyroscope is made with a 5 mm radius shell resonator operating in $n=2$ wine-glass mode at a frequency ($f_{n=2}$) of 5.803 kHz with as-fabricated frequency split ($\Delta f$) of 2.1 Hz. Large and reasonably uniform capacitance (∼0.25 pF) is achieved with flat surface electrodes. The gyroscope is operated in the force-rebalance mode by interfacing with an ultra-low-noise transimpedance amplifier (TIA). Near-navigation grade angle random walk (ARW) of $0.0062\ \deg/\sqrt{\mathrm{h}}\mathrm{r}$, in-run bias instability (BI) of 0.027 deg/hr and scale factor of 158 mV/deg/s without any temperature compensation are achieved.