Failure analysis of thermal degradation of TIM during power cycling

H. Zhang, S. Li, H. Liu, J. Bunt, F. Pompeo, K. Sikka, K. Rivera, H. Longworth, C. Lian
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引用次数: 5

Abstract

This paper discusses a thermal reliability testing experiment and failure analysis (FA) in 32nm SOI Si technology chip packages. Thermal performance of the TIM materials is monitored and physical failure analysis is performed on test vehicle packages post thermal reliability test. Thermomechanical modeling is conducted for different test conditions. TIM thermal degradation is observed at the chip center area in the batch of samples post power cycling (PC) test, while the TIM performance remains normal in the other batch of samples post thermal aging (TA) test. Physical FA findings after TIM bond line thickness measurement (at the chip corners and chip center) and unlidding to inspect the TIM surface morphology confirmed the failure mode is TIM to chip tearing. Finite element modeling results indicate significant difference of stress status in TIM and sealband adhesive between PC and TA test. The TIM experiences compressive stress during PC test, while it is in tensile stress during TA test.
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电源循环过程中TIM热降解失效分析
本文讨论了32nm SOI Si工艺芯片封装的热可靠性测试实验和失效分析(FA)。对TIM材料的热性能进行了监测,并对热可靠性测试后的测试车辆封装进行了物理失效分析。对不同的试验条件进行了热力学建模。在电源循环(PC)测试后的一批样品中,在芯片中心区域观察到TIM的热退化,而在热老化(TA)测试后的另一批样品中,TIM的性能保持正常。通过测量TIM键合线厚度(在切屑的边角和切屑的中心)和开箱检查TIM表面形貌后的物理FA结果证实了TIM对切屑的撕裂破坏模式。有限元模拟结果表明,PC和TA试验对TIM和密封胶粘剂的应力状态有显著差异。在PC试验中,TIM处于压应力状态,在TA试验中,TIM处于拉应力状态。
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