Energy Storage Performance of PZT/PZ Composite Films Obtained by Sol–Gel Method

Abstract

PbZr0.52Ti0.48O3(PZT)/PbZrO3(PZ) composite films are deposited on LaNiO3/SiO2/Si substrates using sol–gel method, and annealed at 620 °C for a different time with the rapid thermal annealing technology. The microstructures, crystal structure, and electrical performance of the PZT/PZ composite films are researched. When the composite films are annealed at 620 °C for 3 min, the PZT films show the perovskite phase and the PZ films exhibit the pyrochlore phase with tiny perovskite phase, making the films obtain a linear hysteresis loop and possess the high energy storage density of 10.0 J cm−3 and the energy storage efficiency of 84.8%. The aforementioned experimental results show that the phase structure of the PZT/PZ multilayer films can be regulated by different annealing times, which would improve the energy storage performance.