{"title":"Deep Level Profiling Using an Admittance Spectroscopy Method","authors":"I. Marchishin, V. N. Ovsyuk, S. B. Sevastianov","doi":"10.1002/PSSA.2211060119","DOIUrl":null,"url":null,"abstract":"A theory for the admittance spectroscopy (AS) to study deep levels in surface-barrier structures with nonuniform distribution of impurities is developed. A procedure of treating experimental data to determine energy positions of levels, their capture cross-sections, as well as the Concentration profiles is described. The effect of various factors on AS resolution is discussed. \n \n \n \n[Russian Text Ignored].","PeriodicalId":18217,"journal":{"name":"March 16","volume":"22 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"1988-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"March 16","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/PSSA.2211060119","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
A theory for the admittance spectroscopy (AS) to study deep levels in surface-barrier structures with nonuniform distribution of impurities is developed. A procedure of treating experimental data to determine energy positions of levels, their capture cross-sections, as well as the Concentration profiles is described. The effect of various factors on AS resolution is discussed.
[Russian Text Ignored].
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